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Precision Metrology Equipment and Instrumentation

A Class 10,000 cleanroom standard “Ultra-precision Measurement Laboratory” is established in the main laboratory at the PolyU and equipped with precision measuring systems.


Multi-sensor Coordinate Measuring System
– WerthVideoCheck UA 
3D Optical Measuring System
– Alicona IFM G4 
Optical Profiling System
– New Zygo NexView 
Measurement System
– Form TalySurf PGI 1240 
Measurement System
Form TalySurf Series 2 
Optical Profiling System
– Wyko NT8000 
Laser Interferometric Non-contact Profiler System
– Zygo

Besides, the laboratory is also equipped with the following measurement instruments:-
• Optikos QC bench MTF Measuring System
• Konica Minolta Chroma-meter – CS-200
• Sindatek Optical Video-based Contact Angle Meter – 100SB
• Hitachi Tabletop Microscope – TM3000
• Parks Systems Atomic Force Microscope – XE 70


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